000			007990000a22002170004500
008			150831t2012 xxu||||| |||| 00| 0 eng d
020			_a9781420055115
041			_aeng
080			_a621.382:620.3 _bM3
942			_cBK _05
100			_aMadou, Marc J.
245			_aFundamentals of microfabrication and nanotechnology vol.1 : solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology
250			_a3rd ed.
260			_aBoca Raton _bCRC Press _c2012
300			_axiii, 641p. : ill.(some col.), photos.(some col.), tables, _bIndex included
650			_aMICROELECTRONICS _910203
650			_aINTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
650			_aMicroelectromechanical Systems _920780
650			_aMicrofabrication _920781
650			_aNanotechnology
999			_c146454 _d146454