TY  - GEN
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology vol.1 : solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology
SN  - 9781420055115
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - MICROELECTRONICS
KW  - INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
KW  - Microelectromechanical Systems
KW  - Microfabrication
KW  - Nanotechnology
ER  -