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Adhesive wafer bonding for microelectronic and microelectromechanical systems

By: Niklaus, FrankLanguage: English Publisher: Stockholm Royal Institute of Technology 2002Description: various paging : ill., tablesISBN: ISSN : [02812878]Subject(s): ADHESIVE WAFER BONDING | CMOS compatible | Thermoplastic | Thermosetting | Benzocyclobutene | Photoresist | Wafer-level
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 Book Book Library, University of Moratuwa
The University of Moratuwa Library (UML) is one of the most prominent technology libraries in the country. Its main subject specializations are Engineering, Architecture and Information Technology. However, the library caters to the requirements of the membership by housing books and other materials of general interest as well.
Thesis Collection
621.3.049.77 N5 (Browse shelf) FU 79 LB/DON/59/2018 Not For Loan Doctoral Thesis - Doctor of Philosophy , Microsystem Technology, Department of Signals, Sensors and Systems, Royal Institute of Technology, Stockholm D196
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