Entry Topical Term

Number of records used in: 3

001 - CONTROL NUMBER

• control field: 20780

003 - CONTROL NUMBER IDENTIFIER

• control field:

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20220819123334.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 220819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency:
• Transcribing agency:

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Microelectromechanical Systems

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: ()146456: Madou, Marc J. 20779, Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications, 2012