Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Record no. 146456)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 007970000a22002170004500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150831t2012 xxu||||| |||| 00| 0 eng d |
| 020 ## - ISBN | |
| ISBN | 9781420055160 |
| 041 ## - LANGUAGE | |
| Language | English |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Classification Number | 621.382:620.3 |
| Call Number | M3 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item Type | Book |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal Author | Madou, Marc J. |
| 245 ## - TITLE STATEMENT | |
| Title | Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications |
| 250 ## - EDITION STATEMENT | |
| Edition | 3rd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of Publication | Boca Raton |
| Name of Publisher | CRC Press |
| Date of Copyright | 2012 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 636p. : ill. (some col.), photos.(some col.), tables, |
| Physical Details | Index included |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | MICROELECTRONICS |
| 9 (RLIN) | 10203 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical Systems |
| 9 (RLIN) | 20780 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microfabrication |
| 9 (RLIN) | 20781 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Nanotechnology |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Permanent location | Current location | Shelving location | Date acquired | Cost, normal purchase price | Total Checkouts | Total Renewals | Full call number | Barcode | Checked out | Date last seen | Date last borrowed | Cost, replacement price | Price effective from | Koha item type | Use restrictions | Shelving Number |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library, University of Moratuwa | Library, University of Moratuwa | Lending Collection | 28/10/2013 | 8897.70 | 4 | 7 | 621.382:620.3 M3 | 106451 | 15/11/2023 | 17/08/2023 | 17/08/2023 | 9886.33 | 20/05/2015 | Book | |||||||
| Library, University of Moratuwa | Library, University of Moratuwa | Lending Collection | 18/09/2018 | 15400.00 | 1 | 1 | 621.382:620.3 M3 | 113233 | 15/10/2019 | 23/05/2019 | 12320.00 | 18/09/2018 | Book | Lending | 03-17-01 |