Pelesko, John A. Bernstein, David H.
Modeling MEMS and NEMS - Boca Raton Chapman & Hall/CRC 2003 - xxi, 357p. : ill.
Index included
1584883065
MICROELCTROMECHANICAL SYSTEMS-Mathematical Models
NANOELECTROMECHANICAL SYSTEMS
621.382:620.3 / P4
Modeling MEMS and NEMS - Boca Raton Chapman & Hall/CRC 2003 - xxi, 357p. : ill.
Index included
1584883065
MICROELCTROMECHANICAL SYSTEMS-Mathematical Models
NANOELECTROMECHANICAL SYSTEMS
621.382:620.3 / P4