Library, University of Moratuwa, Sri Lanka catalog

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Madou, Marc J.

Fundamentals of microfabrication and nanotechnology vol. II : manufacturing techniques for microfabrication and nanotechnology - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 656p. : ill.(some col.), photos.,(some col.), tables, Index & references included

ISBN: 9781420055191

Subjects--Topical Terms:
MICROELECTRONICS
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
Microelectromechanical Systems
Microfabrication
Nanotechnology

Universal Decimal Class. No.: 621.382:620.3 / M3

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