Madou, Marc J.
Fundamentals of microfabrication and nanotechnology vol.1 : solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 641p. : ill.(some col.), photos.(some col.), tables, Index included
9781420055115
MICROELECTRONICS
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
Microelectromechanical Systems
Microfabrication
Nanotechnology
621.382:620.3 / M3
Fundamentals of microfabrication and nanotechnology vol.1 : solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 641p. : ill.(some col.), photos.(some col.), tables, Index included
9781420055115
MICROELECTRONICS
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
Microelectromechanical Systems
Microfabrication
Nanotechnology
621.382:620.3 / M3